Insights into metal drift induced failure in MOL and BEOL

Chen Wu, O. Varela Pedreira, Alicja Lesniewska, Yunlong Li, Ivan Ciofi, Zsolt Tokei, Kris Croes. Insights into metal drift induced failure in MOL and BEOL. In IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018. pages 3, IEEE, 2018. [doi]

Abstract

Abstract is missing.