Micromachined interferometric accelerometer fabricated using SGADER process - researchr publication authors

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Kang Wu, Xiongying Ye, Feng Chen, Litao Liu, Linrui Guo, Zhaoying Zhou. Micromachined interferometric accelerometer fabricated using SGADER process. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 1058-1061, IEEE, 2009. [doi]

This author has not been identified. Look up 'Kang Wu' in GoogleThis author has not been identified. Look up 'Xiongying Ye' in GoogleThis author has not been identified. Look up 'Feng Chen' in GoogleThis author has not been identified. Look up 'Litao Liu' in GoogleThis author has not been identified. Look up 'Linrui Guo' in GoogleThis author has not been identified. Look up 'Zhaoying Zhou' in Google

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