Kang Wu, Xiongying Ye, Feng Chen, Litao Liu, Linrui Guo, Zhaoying Zhou. Micromachined interferometric accelerometer fabricated using SGADER process. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 1058-1061, IEEE, 2009. [doi]
Abstract is missing.