Kang Wu, Xiongying Ye, Feng Chen, Litao Liu, Linrui Guo, Zhaoying Zhou. Micromachined interferometric accelerometer fabricated using SGADER process. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 1058-1061, IEEE, 2009. [doi]
@inproceedings{WuYCLGZ09, title = {Micromachined interferometric accelerometer fabricated using SGADER process}, author = {Kang Wu and Xiongying Ye and Feng Chen and Litao Liu and Linrui Guo and Zhaoying Zhou}, year = {2009}, doi = {10.1109/NEMS.2009.5068755}, url = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068755}, researchr = {https://researchr.org/publication/WuYCLGZ09}, cites = {0}, citedby = {0}, pages = {1058-1061}, booktitle = {4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009}, publisher = {IEEE}, isbn = {978-1-4244-4629-2}, }