-3 Active Doping and Demonstration on Highly-Scaled 3D Structures - researchr publication authors

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Haiwen Xu, Rami Khazaka, Jishen Zhang, Zijie Zheng, Yue Chen, Xiao Gong. -3 Active Doping and Demonstration on Highly-Scaled 3D Structures. In IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022. pages 367-368, IEEE, 2022. [doi]

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