Haiwen Xu, Rami Khazaka, Jishen Zhang, Zijie Zheng, Yue Chen, Xiao Gong. -3 Active Doping and Demonstration on Highly-Scaled 3D Structures. In IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022. pages 367-368, IEEE, 2022. [doi]
@inproceedings{XuKZZCG22,
title = {-3 Active Doping and Demonstration on Highly-Scaled 3D Structures},
author = {Haiwen Xu and Rami Khazaka and Jishen Zhang and Zijie Zheng and Yue Chen and Xiao Gong},
year = {2022},
doi = {10.1109/VLSITechnologyandCir46769.2022.9830220},
url = {https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830220},
researchr = {https://researchr.org/publication/XuKZZCG22},
cites = {0},
citedby = {0},
pages = {367-368},
booktitle = {IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022},
publisher = {IEEE},
isbn = {978-1-6654-9772-5},
}