Haiwen Xu, Rami Khazaka, Jishen Zhang, Zijie Zheng, Yue Chen, Xiao Gong. -3 Active Doping and Demonstration on Highly-Scaled 3D Structures. In IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022. pages 367-368, IEEE, 2022. [doi]
Abstract is missing.