A novel test structure for measuring the threshold voltage variance in MOSFETs

Takahiro J. Yamaguchi, James S. Tandon, Satoshi Komatsu, Kunihiro Asada. A novel test structure for measuring the threshold voltage variance in MOSFETs. In 2013 IEEE International Test Conference, ITC 2013, Anaheim, CA, USA, September 6-13, 2013. pages 1-8, IEEE Computer Society, 2013. [doi]

Abstract

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