Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs applications - researchr publication authors

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Yangyang Yan, Yingtao Ding, Qianwen Chen, Kang-Wook Lee, Takafumi Fukushima, Mitsumasa Koyanagi. Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs applications. In 2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai, Japan, August 31 - September 2, 2015. IEEE, 2015. [doi]

This author has not been identified. Look up 'Yangyang Yan' in GoogleThis author has not been identified. Look up 'Yingtao Ding' in GoogleThis author has not been identified. Look up 'Qianwen Chen' in GoogleThis author has not been identified. Look up 'Kang-Wook Lee' in GoogleThis author has not been identified. Look up 'Takafumi Fukushima' in GoogleThis author has not been identified. Look up 'Mitsumasa Koyanagi' in Google

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