Yangyang Yan, Yingtao Ding, Qianwen Chen, Kang-Wook Lee, Takafumi Fukushima, Mitsumasa Koyanagi. Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs applications. In 2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai, Japan, August 31 - September 2, 2015. IEEE, 2015. [doi]
@inproceedings{YanDCLFK15,
title = {Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs applications},
author = {Yangyang Yan and Yingtao Ding and Qianwen Chen and Kang-Wook Lee and Takafumi Fukushima and Mitsumasa Koyanagi},
year = {2015},
doi = {10.1109/3DIC.2015.7334568},
url = {http://dx.doi.org/10.1109/3DIC.2015.7334568},
researchr = {https://researchr.org/publication/YanDCLFK15},
cites = {0},
citedby = {0},
booktitle = {2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai, Japan, August 31 - September 2, 2015},
publisher = {IEEE},
isbn = {978-1-4673-9385-0},
}