Chih-Feng Yen, Yu-Ya Huang, Shen-Hao Tsao, Shih-Hao Lin, Chun-Hu Cheng. Influence of Y2O3 Doped HfO2 High-k Films on Electrical Properties of MOS and MIM Devices. In 5th IEEE International Conference on Knowledge Innovation and Invention, ICKII 2022, Hualien, Taiwan, July 22-24, 2022. pages 225-229, IEEE, 2022. [doi]
Abstract is missing.