Direct bonding SOI Wafer based MEMS cantilever resonator for trace gas sensor applicaiton

Dong Ying, Gao Wei, You Zheng. Direct bonding SOI Wafer based MEMS cantilever resonator for trace gas sensor applicaiton. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 134-138, IEEE, 2009. [doi]

Authors

Dong Ying

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Gao Wei

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You Zheng

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