Dong Ying, Gao Wei, You Zheng. Direct bonding SOI Wafer based MEMS cantilever resonator for trace gas sensor applicaiton. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 134-138, IEEE, 2009. [doi]
Abstract is missing.