Dong Ying, Gao Wei, You Zheng. Direct bonding SOI Wafer based MEMS cantilever resonator for trace gas sensor applicaiton. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 134-138, IEEE, 2009. [doi]
@inproceedings{YingWZ09,
title = {Direct bonding SOI Wafer based MEMS cantilever resonator for trace gas sensor applicaiton},
author = {Dong Ying and Gao Wei and You Zheng},
year = {2009},
doi = {10.1109/NEMS.2009.5068543},
url = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068543},
tags = {rule-based},
researchr = {https://researchr.org/publication/YingWZ09},
cites = {0},
citedby = {0},
pages = {134-138},
booktitle = {4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009},
publisher = {IEEE},
isbn = {978-1-4244-4629-2},
}