Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques - researchr publication authors

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U. Zaghloul, M. Koutsoureli, H. Wang, Fabio Coccetti, G. Papaioannou, Patrick Pons, Robert Plana. Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques. Microelectronics Reliability, 50(9-11):1615-1620, 2010. [doi]

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Hua Wang

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