U. Zaghloul, M. Koutsoureli, H. Wang, Fabio Coccetti, G. Papaioannou, Patrick Pons, Robert Plana. Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques. Microelectronics Reliability, 50(9-11):1615-1620, 2010. [doi]
@article{ZaghloulKWCPPP10,
title = {Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques},
author = {U. Zaghloul and M. Koutsoureli and H. Wang and Fabio Coccetti and G. Papaioannou and Patrick Pons and Robert Plana},
year = {2010},
doi = {10.1016/j.microrel.2010.07.027},
url = {http://dx.doi.org/10.1016/j.microrel.2010.07.027},
researchr = {https://researchr.org/publication/ZaghloulKWCPPP10},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {50},
number = {9-11},
pages = {1615-1620},
}