Electromigration limits of copper nano-interconnects

Houman Zahedmanesh, Olalla Varela Pedreira, Zsolt Tokei, Kristof Croes. Electromigration limits of copper nano-interconnects. In IEEE International Reliability Physics Symposium, IRPS 2021, Monterey, CA, USA, March 21-25, 2021. pages 1-6, IEEE, 2021. [doi]

Abstract

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