Rapid Precision Positioning with Transition-Positioning Switching in Stepper Lithography - researchr publication authors

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Zezhou Zhang, Jianxiao Zou, Jian Zhang, Chao Peng. Rapid Precision Positioning with Transition-Positioning Switching in Stepper Lithography. In 2019 American Control Conference, ACC 2019, Philadelphia, PA, USA, July 10-12, 2019. pages 5687-5692, IEEE, 2019. [doi]

This author has not been identified. Look up 'Zezhou Zhang' in GoogleThis author has not been identified. Look up 'Jianxiao Zou' in GoogleThis author has not been identified. Look up 'Jian Zhang' in GoogleThis author has not been identified. Look up 'Chao Peng' in Google

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