Zezhou Zhang, Jianxiao Zou, Jian Zhang, Chao Peng. Rapid Precision Positioning with Transition-Positioning Switching in Stepper Lithography. In 2019 American Control Conference, ACC 2019, Philadelphia, PA, USA, July 10-12, 2019. pages 5687-5692, IEEE, 2019. [doi]
Abstract is missing.