Zezhou Zhang, Jianxiao Zou, Jian Zhang, Chao Peng. Rapid Precision Positioning with Transition-Positioning Switching in Stepper Lithography. In 2019 American Control Conference, ACC 2019, Philadelphia, PA, USA, July 10-12, 2019. pages 5687-5692, IEEE, 2019. [doi]
@inproceedings{ZhangZZP19-0,
title = {Rapid Precision Positioning with Transition-Positioning Switching in Stepper Lithography},
author = {Zezhou Zhang and Jianxiao Zou and Jian Zhang and Chao Peng},
year = {2019},
url = {http://ieeexplore.ieee.org/document/8814382},
researchr = {https://researchr.org/publication/ZhangZZP19-0},
cites = {0},
citedby = {0},
pages = {5687-5692},
booktitle = {2019 American Control Conference, ACC 2019, Philadelphia, PA, USA, July 10-12, 2019},
publisher = {IEEE},
isbn = {978-1-5386-7926-5},
}