High-performance silicon modulator for integrated transceivers fabricated on 300-mm wafer

S. Akiyama, T. Baba, M. Imai, M. Mori, T. Usuki. High-performance silicon modulator for integrated transceivers fabricated on 300-mm wafer. In The European Conference on Optical Communication, ECOC 2014, Cannes, France, September 21-25, 2014. pages 1-3, IEEE, 2014. [doi]

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