Femtosecond Laser Ablation for Backside Silicon Thinning

Felix Beaudoin, J. López, M. Faucon, Romain Desplats, Philippe Perdu. Femtosecond Laser Ablation for Backside Silicon Thinning. Microelectronics Reliability, 44(9-11):1605-1609, 2004. [doi]

Authors

Felix Beaudoin

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J. López

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M. Faucon

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Romain Desplats

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Philippe Perdu

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