Femtosecond Laser Ablation for Backside Silicon Thinning

Felix Beaudoin, J. López, M. Faucon, Romain Desplats, Philippe Perdu. Femtosecond Laser Ablation for Backside Silicon Thinning. Microelectronics Reliability, 44(9-11):1605-1609, 2004. [doi]

Abstract

Abstract is missing.