Felix Beaudoin, J. López, M. Faucon, Romain Desplats, Philippe Perdu. Femtosecond Laser Ablation for Backside Silicon Thinning. Microelectronics Reliability, 44(9-11):1605-1609, 2004. [doi]
@article{BeaudoinLFDP04,
title = {Femtosecond Laser Ablation for Backside Silicon Thinning},
author = {Felix Beaudoin and J. López and M. Faucon and Romain Desplats and Philippe Perdu},
year = {2004},
doi = {10.1016/j.microrel.2004.07.077},
url = {http://dx.doi.org/10.1016/j.microrel.2004.07.077},
researchr = {https://researchr.org/publication/BeaudoinLFDP04},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {44},
number = {9-11},
pages = {1605-1609},
}