Testing Resonant Micro-Electro-Mechanical Sensors using the Oscillation-based Test Methodology

Vincent Beroulle, Yves Bertrand, Laurent Latorre, Pascal Nouet. Testing Resonant Micro-Electro-Mechanical Sensors using the Oscillation-based Test Methodology. In 3rd Latin American Test Workshop, LATW 2002, Montevideo, Uruguay, February 10-13, 2002. pages 99-104, IEEE, 2002.

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