Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
Chris C. N. Chu, Wai-Kei Mak. Flexible Packed Stencil Design With Multiple Shaping Apertures and Overlapping Shots for E-beam Lithography. IEEE Trans. on CAD of Integrated Circuits and Systems, 34(10):1652-1663, 2015. [doi]