Understanding EM-Degradation Mechanisms in Metal Heaters Used for Si Photonics Applications

Kris Croes, Veerle Simons, Sofie Beyne, Vladimir Cherman, Herman Oprins, Michele Stucchi, Ph. Absil, A. Glabman, Eric Wilcox. Understanding EM-Degradation Mechanisms in Metal Heaters Used for Si Photonics Applications. In IEEE International Reliability Physics Symposium, IRPS 2019, Monterey, CA, USA, March 31 - April 4, 2019. pages 1-4, IEEE, 2019. [doi]

Abstract

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