Vacuum-sealed silicon micromachined pressure sensors

Masayoshi Esashi, Susumu Sugiyama, Kyoichi Ikeda, Yuelin Wang, Haruzo Miyashita. Vacuum-sealed silicon micromachined pressure sensors. Proceedings of the IEEE, 86(8):1627-1639, 1998. [doi]

Possibly Related Publications

The following publications are possibly variants of this publication: