Parallel Beam Micro Sensor/Actuator Unit Using PZT Thin Films and its Application Examples

Toshio Fukuda, Hiroshi Sato, Fumihito Arai, Hitoshi Iwata, Kouichi Itoigawa. Parallel Beam Micro Sensor/Actuator Unit Using PZT Thin Films and its Application Examples. In ICRA. pages 1498-1503, 1998.

Authors

Toshio Fukuda

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Hiroshi Sato

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Fumihito Arai

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Hitoshi Iwata

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Kouichi Itoigawa

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