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Toshio Fukuda, Hiroshi Sato, Fumihito Arai, Hitoshi Iwata, Kouichi Itoigawa. Parallel Beam Micro Sensor/Actuator Unit Using PZT Thin Films and its Application Examples. In ICRA. pages 1498-1503, 1998.
Possibly Related PublicationsThe following publications are possibly variants of this publication: Voice-supported Active Touch Panel Using Micro Touch Sensor with PZT Thin FilmGuiryong Kwon, Fumihito Arai, Toshio Fukuda, Kouichi Itoigawa, Yasunori Tsukahara. jrm, 15(4):384-390, 2003. [doi] Dome Shaped Touch Sensor Using PZT Thin Film made by Hydrothermal MethodFumihito Arai, Toshio Fukuda, Kouichi Itoigawa, Yasunori Thukahara. icra 2001: 577-582
The following publications are possibly variants of this publication: