Parallel Beam Micro Sensor/Actuator Unit Using PZT Thin Films and its Application Examples

Toshio Fukuda, Hiroshi Sato, Fumihito Arai, Hitoshi Iwata, Kouichi Itoigawa. Parallel Beam Micro Sensor/Actuator Unit Using PZT Thin Films and its Application Examples. In ICRA. pages 1498-1503, 1998.

Abstract

Abstract is missing.