Toshio Fukuda, Hiroshi Sato, Fumihito Arai, Hitoshi Iwata, Kouichi Itoigawa. Parallel Beam Micro Sensor/Actuator Unit Using PZT Thin Films and its Application Examples. In ICRA. pages 1498-1503, 1998.
@inproceedings{FukudaSAII98,
title = {Parallel Beam Micro Sensor/Actuator Unit Using PZT Thin Films and its Application Examples},
author = {Toshio Fukuda and Hiroshi Sato and Fumihito Arai and Hitoshi Iwata and Kouichi Itoigawa},
year = {1998},
researchr = {https://researchr.org/publication/FukudaSAII98},
cites = {0},
citedby = {0},
pages = {1498-1503},
booktitle = {ICRA},
}