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Scanning Microwave Microscopy for Electronic Device Analysis on Nanometre Scale

Sören Hommel, Nicole Killat, A. Altes, Thomas Schweinböck, Doris Schmitt-Landsiedel, M. Silvestri, O. Haeberlen. Scanning Microwave Microscopy for Electronic Device Analysis on Nanometre Scale. Microelectronics Reliability, 64:310-312, 2016. [doi]

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