Layout Decomposition Approaches for Double Patterning Lithography

Andrew B. Kahng, Chul-Hong Park, Xu Xu, Hailong Yao. Layout Decomposition Approaches for Double Patterning Lithography. IEEE Trans. on CAD of Integrated Circuits and Systems, 29(6):939-952, 2010. [doi]

Authors

Andrew B. Kahng

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Chul-Hong Park

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Xu Xu

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Hailong Yao

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