Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, Kazuaki Saiki. Trajectory tracking control for pneumatic actuated scan stage with time delay compensation. In IECON 2016 - 42nd Annual Conference of the IEEE Industrial Electronics Society, Florence, Italy, October 23-26, 2016. pages 5125-5130, IEEE, 2016. [doi]
Abstract is missing.