Wesley D. Sacher, Jared C. Mikkelsen, Ying Huang, Jason C. C. Mak, Zheng Yong, Xianshu Luo, Yu Li, Patrick Dumais, Jia Jiang, Dominic Goodwill, Eric Bernier, Patrick Guo-Qiang Lo, Joyce K. S. Poon. Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices. Proceedings of the IEEE, 106(12):2232-2245, 2018. [doi]
@article{SacherMHMYLLDJG18,
title = {Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices},
author = {Wesley D. Sacher and Jared C. Mikkelsen and Ying Huang and Jason C. C. Mak and Zheng Yong and Xianshu Luo and Yu Li and Patrick Dumais and Jia Jiang and Dominic Goodwill and Eric Bernier and Patrick Guo-Qiang Lo and Joyce K. S. Poon},
year = {2018},
doi = {10.1109/JPROC.2018.2860994},
url = {https://doi.org/10.1109/JPROC.2018.2860994},
researchr = {https://researchr.org/publication/SacherMHMYLLDJG18},
cites = {0},
citedby = {0},
journal = {Proceedings of the IEEE},
volume = {106},
number = {12},
pages = {2232-2245},
}