Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices

Wesley D. Sacher, Jared C. Mikkelsen, Ying Huang, Jason C. C. Mak, Zheng Yong, Xianshu Luo, Yu Li, Patrick Dumais, Jia Jiang, Dominic Goodwill, Eric Bernier, Patrick Guo-Qiang Lo, Joyce K. S. Poon. Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices. Proceedings of the IEEE, 106(12):2232-2245, 2018. [doi]

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