Wesley D. Sacher, Jared C. Mikkelsen, Ying Huang, Jason C. C. Mak, Zheng Yong, Xianshu Luo, Yu Li, Patrick Dumais, Jia Jiang, Dominic Goodwill, Eric Bernier, Patrick Guo-Qiang Lo, Joyce K. S. Poon. Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices. Proceedings of the IEEE, 106(12):2232-2245, 2018. [doi]
Abstract is missing.