Abhitosh Vais, B. Hsu, O. Syshchyk, H. Yu, AliReza Alian, Y. Mols, K. V. Kodandarama, B. Kunert, Niamh Waldron, Eddy Simoen, Nadine Collaert. A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies. In IEEE International Reliability Physics Symposium, IRPS 2021, Monterey, CA, USA, March 21-25, 2021. pages 1-5, IEEE, 2021. [doi]
Abstract is missing.