Simulation study of lateral CEFT logic performance at 3 nm Node

Guanguo Wen, Qiang Long, Xinlong Shi, Ying Wang, Feng Liu, Huiyong Hu, JinCheng Zhang. Simulation study of lateral CEFT logic performance at 3 nm Node. Microelectronics Journal, 139:105865, September 2023. [doi]

Abstract

Abstract is missing.