Comprehensive Methodology for Multiple Spots Competing Progressive Breakdown for BEOL/FEOL Applications

Ernest Y. Wu, Baozhen Li, James H. Stathis, Andrew Kim. Comprehensive Methodology for Multiple Spots Competing Progressive Breakdown for BEOL/FEOL Applications. In IEEE International Reliability Physics Symposium, IRPS 2019, Monterey, CA, USA, March 31 - April 4, 2019. pages 1-8, IEEE, 2019. [doi]

Abstract

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