Investigation on dependency of thermal characteristics on gate/drain bias voltages in stacked nanosheet transistors

Peng Zhao, Lei Cao, Fan Zhang, Haoqing Xu, Weizhuo Gan, Qingzhu Zhang, Zhaohao Zhang, Jiaxin Yao, Guoliang Tian, Kun Luo, Zhenhua Wu, Huaxiang Yin. Investigation on dependency of thermal characteristics on gate/drain bias voltages in stacked nanosheet transistors. Microelectronics Journal, 141:105970, November 2023. [doi]

Abstract

Abstract is missing.