NBTI Impact of Surface Orientation in Stacked Gate-All-Around Nanosheet Transistor

Huimei Zhou, Miaomiao Wang, Jingyun Zhang, Koji Watanabe, Curtis Durfee, Shogo Mochizuki, Ruqiang Bao, Richard G. Southwick, Maruf Bhuiyan, Basker Veeraraghavan. NBTI Impact of Surface Orientation in Stacked Gate-All-Around Nanosheet Transistor. In 2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020. pages 1-6, IEEE, 2020. [doi]

@inproceedings{ZhouWZWDMBSBV20,
  title = {NBTI Impact of Surface Orientation in Stacked Gate-All-Around Nanosheet Transistor},
  author = {Huimei Zhou and Miaomiao Wang and Jingyun Zhang and Koji Watanabe and Curtis Durfee and Shogo Mochizuki and Ruqiang Bao and Richard G. Southwick and Maruf Bhuiyan and Basker Veeraraghavan},
  year = {2020},
  doi = {10.1109/IRPS45951.2020.9129023},
  url = {https://doi.org/10.1109/IRPS45951.2020.9129023},
  researchr = {https://researchr.org/publication/ZhouWZWDMBSBV20},
  cites = {0},
  citedby = {0},
  pages = {1-6},
  booktitle = {2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020},
  publisher = {IEEE},
  isbn = {978-1-7281-3199-3},
}