Journal: IBM Journal of Research and Development

Volume 39, Issue 4

370 -- 370T. S. Kuan. Preface
371 -- 382James G. Ryan, Robert M. Geffken, Neil R. Poulin, Jurij R. Paraszczak. The evolution of interconnection technology at IBM
383 -- 402Daniel C. Edelstein, George A. Sai-Halasz, Yuh-Jier Mii. VLSI on-chip interconnection performance simulations and measurements
403 -- 418Randy W. Mann, Larry A. Clevenger, Paul D. Agnello, Francis R. White. Silicides and local interconnections for high-performance VLSI applications
419 -- 436Thomas J. Licata, Evan G. Colgan, James M. E. Harper, Stephen E. Luce. Interconnect fabrication processes and the development of low-cost wiring for CMOS products
437 -- 464Donna R. Cote, Son Van Nguyen, William J. Cote, Scott L. Pennington, Anthony K. Stamper, Dragan V. Podlesnik. Low-temperature chemical vapor deposition processes and dielectrics for microelectronic circuit manufacturing at IBM
465 -- 498Chao-Kun Hu, Kenneth P. Rodbell, Timothy D. Sullivan, Kim Y. Lee, Dennis P. Bouldin. Electromigration and stress-induced voiding in fine Al and Al-alloy thin-film lines