Distribution and generation of traps in SiO::2::/Al::2::O::3:: gate stacks

Isodiana Crupi, Robin Degraeve, Bogdan Govoreanu, David P. Brunco, Philippe Roussel, Jan Van Houdt. Distribution and generation of traps in SiO::2::/Al::2::O::3:: gate stacks. Microelectronics Reliability, 47(4-5):525-527, 2007. [doi]

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