Cost-effective cleaning and high-quality thin gate oxides - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

Marc M. Heyns, Twan Bearda, Ingrid Cornelissen, Stefan De Gendt, Robin Degraeve, Guido Groeseneken, Conny Kenens, D. Martin Knotter, Lee M. Loewenstein, Paul W. Mertens, Sofie Mertens, Marc Meuris, Tanya Nigam, Marc Schaekers, Ivo Teerlinck, Wilfried Vandervorst, Rita Vos, Klaus Wolke. Cost-effective cleaning and high-quality thin gate oxides. IBM Journal of Research and Development, 43(3):339-350, 1999. [doi]

This author has not been identified. Look up 'Marc M. Heyns' in GoogleThis author has not been identified. Look up 'Twan Bearda' in GoogleThis author has not been identified. Look up 'Ingrid Cornelissen' in GoogleThis author has not been identified. Look up 'Stefan De Gendt' in GoogleThis author has not been identified. Look up 'Robin Degraeve' in GoogleThis author has not been identified. Look up 'Guido Groeseneken' in GoogleThis author has not been identified. Look up 'Conny Kenens' in GoogleThis author has not been identified. Look up 'D. Martin Knotter' in GoogleThis author has not been identified. Look up 'Lee M. Loewenstein' in GoogleThis author has not been identified. Look up 'Paul W. Mertens' in GoogleThis author has not been identified. Look up 'Sofie Mertens' in GoogleThis author has not been identified. Look up 'Marc Meuris' in GoogleThis author has not been identified. Look up 'Tanya Nigam' in GoogleThis author has not been identified. Look up 'Marc Schaekers' in GoogleThis author has not been identified. Look up 'Ivo Teerlinck' in GoogleThis author has not been identified. Look up 'Wilfried Vandervorst' in GoogleThis author has not been identified. Look up 'Rita Vos' in GoogleThis author has not been identified. Look up 'Klaus Wolke' in Google

runs on WebDSL