Marc M. Heyns, Twan Bearda, Ingrid Cornelissen, Stefan De Gendt, Robin Degraeve, Guido Groeseneken, Conny Kenens, D. Martin Knotter, Lee M. Loewenstein, Paul W. Mertens, Sofie Mertens, Marc Meuris, Tanya Nigam, Marc Schaekers, Ivo Teerlinck, Wilfried Vandervorst, Rita Vos, Klaus Wolke. Cost-effective cleaning and high-quality thin gate oxides. IBM Journal of Research and Development, 43(3):339-350, 1999. [doi]
@article{HeynsBCGDGKKLMMMNSTVVW99,
title = {Cost-effective cleaning and high-quality thin gate oxides},
author = {Marc M. Heyns and Twan Bearda and Ingrid Cornelissen and Stefan De Gendt and Robin Degraeve and Guido Groeseneken and Conny Kenens and D. Martin Knotter and Lee M. Loewenstein and Paul W. Mertens and Sofie Mertens and Marc Meuris and Tanya Nigam and Marc Schaekers and Ivo Teerlinck and Wilfried Vandervorst and Rita Vos and Klaus Wolke},
year = {1999},
doi = {10.1147/rd.433.0339},
url = {http://dx.doi.org/10.1147/rd.433.0339},
researchr = {https://researchr.org/publication/HeynsBCGDGKKLMMMNSTVVW99},
cites = {0},
citedby = {0},
journal = {IBM Journal of Research and Development},
volume = {43},
number = {3},
pages = {339-350},
}