Internal testing of integrated circuits by noncontact sampling electrostatic force microscopy using pulse width modulation technique

R. A. Said. Internal testing of integrated circuits by noncontact sampling electrostatic force microscopy using pulse width modulation technique. In International Symposium on Circuits and Systems (ISCAS 1999), May 30 - June 2, 1999, Orlando, Florida, USA. pages 124-128, IEEE, 1999. [doi]

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