3D chip-stacking technology with through-silicon vias and low-volume lead-free interconnections

Katsuyuki Sakuma, Paul S. Andry, Cornelia K. Tsang, Steven L. Wright, Bing Dang, Chirag S. Patel, Bucknell C. Webb, J. Maria, Edmund J. Sprogis, S. K. Kang, Robert J. Polastre, Raymond R. Horton, John U. Knickerbocker. 3D chip-stacking technology with through-silicon vias and low-volume lead-free interconnections. IBM Journal of Research and Development, 52(6):611-622, 2008. [doi]

Authors

Katsuyuki Sakuma

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Paul S. Andry

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Cornelia K. Tsang

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Steven L. Wright

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Bing Dang

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Chirag S. Patel

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Bucknell C. Webb

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J. Maria

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Edmund J. Sprogis

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S. K. Kang

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Robert J. Polastre

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Raymond R. Horton

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John U. Knickerbocker

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