| 435 | -- | 438 | Y.-C. Lin, J. C. Chiou, C. L. Chen. A Digital/Analog Electrostatic Actuating Mechanism For Optical Applications |
| 439 | -- | 442 | H. Cai, C. W. Chan, K. V. Ling, C. Lu, Y. X. Wang, A. Q. Liu. A Study Of Closed-Loop Control Of Optical MEMS Device |
| 443 | -- | 446 | Franck Chollet, Chun Hong Low, Sok Kim Lee, Chun Yang. Fabrication Of Concave And Convex Micro-Optical Elements With Polymer For Free-Space Micro-Optical Bench |
| 447 | -- | 450 | H. B. Liu, Franck Chollet. Optical Switch Based On Moving Polymer Waveguides And Self-Latching Structure |
| 451 | -- | 454 | J. Li, J. B. Zhang, X. M. Zhang, C. Lu, Q. X. Zhang. Instructions Micromachined Tunable Filter Via Actuation Of Fabry-Parot Cavity |
| 455 | -- | 459 | A. Q. Liu, X. M. Zhang, J. Li, D. Y. Tang. Characteristics Of Micromachined Short-External-Cavity Tunable Lasers |
| 461 | -- | 465 | S. H. Wang, C. Quan, C. J. Tay, I. Reading, Z. P. Fang. Characterization Of The Deformation Of Micro-Components Using Optical Interferometry |
| 467 | -- | 470 | Andreas H. Foitzik, Wolfgang Kaese, Thomas Vogt, Michael Sommerer, Serguei Arkhipov. Static And Dynamic Characterization Of Mems Via ESPI |
| 471 | -- | 475 | Jacek Baborowski, Nicolas Ledermann, Paul Muralt, Daniel Schmitt. Simulation And Characterization Of Piezoelectric Micromachined Ultrasonic Transducers (pMUTs) Based On Pzt/Soi Membranes |
| 477 | -- | 480 | Ashok K. Pandey, R. Pratap. Studies In Nonlinear Effects Of Squeeze Film Damping In Mems Structures |
| 481 | -- | 484 | W. M. Yang, S. K. Chou, C. Shu, Z. W. Li, H. Xue. Power Generation At The Micro Scale |
| 485 | -- | 488 | K. N. Bhat, B. R. K. Reddy, V. Vinoth Kumar, K. Siva Kumar, Y. Sushma, N. Ramesh Babu, K. Natarajan. Design Optimization, Fabrication And Testing Of A Capacitive Silicon Accelerometer Using An Soi Approach |
| 489 | -- | 492 | Prem Pal, Suneet Tuli, Sudhir Chandra. Design And Fabrication Of SIO::2:: Micromechanical Structures Inside Anisotropically Etched Cavity |
| 493 | -- | 496 | Dongil Cho, Hyoungho Ko, Jongpal Kim, Sangjun Park, Donghun Kwak, Taeyong Song, William Carr, James Bus. A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process |
| 497 | -- | 500 | Andrew B. Randles, Brett J. Pokines, Shuji Tanaka, Masayoshi Esashi. Deep Structures Wet Etched Into Lithium Niobate Using A Physical Mask |
| 501 | -- | 504 | Jianxia Gao, Mary B. Chan-Park, Dongzhu Xie, Bryan K. A. Ngoi, Chee Yoon Yue. Sub-Micron Patterning Titanium Nitride By Focused Ion-Beam Technique |
| 505 | -- | 508 | V. Pradeep Kumar, S. Karmalkar. Study Of Electroless Nickel On Polished Silicon For Mems Applications |
| 509 | -- | 512 | Hong Zhu, Jianmin Miao, Bangtao Chen, Zhihong Wang, Weiguan Zhu. Micromachining Process Of Piezoelectric Microcantilever Using Pzt Thin Film |
| 513 | -- | 516 | X. B. Zeng, J. F. Li, X. W. Sun, G. J. Qi, X. T. Zeng. Polycrystalline Silicon Thin Film Obtained By Aluminum Induced Crystallization |
| 517 | -- | 520 | K. L. Zhang, S. K. Chou, Simon S. Ang, X. S. Tang, J. S. Phang. Investigation Of Solid Propellant Microthrusters |
| 521 | -- | 524 | Sudhir Chandra, Vivekanand Bhatt, Shrawan K. Jha. Sputtered Silicon Dioxide Films For Mems Application |
| 525 | -- | 528 | Gregor Wiche, Jost Goettert, Yujun Song, Josef Hormes, Challa S. S. R. Kumar. Functional Micro Devices Using Nanoparticle-Photoresist Composites |
| 529 | -- | 532 | Zhong-Geng Ling, Kun Lian, Jian Zhang. Characterization And Application Of Pag Diluted SU-8 |
| 533 | -- | 536 | Kun Lian, J. C. Jiang, S. Wen, C. G. Liu, Zhong-Geng Ling. Thermal Stability And Resulting Surface Mechanical Properties Of Electroplated Nanocrystalline Ni-Based Mems Material |
| 537 | -- | 541 | Shuhui Yu, Kui Yao, Francis Eng Hock Tay. (100)-Oriented PZN-xpt Thin Films Grown On Lanio::3:: Seeding Layers |
| 543 | -- | 546 | Tibor Lalinsky, M. Krnac, S. Hascik, Z. Mozolova, L. Matay, I. Kostic, P. Hrkut, Jiri Jakovenko, Miroslav Husak. Micromechanical Thermal Converter Device Based On Polyimide-Fixed Island Structure |
| 547 | -- | 550 | Ning Jiang, Rajnish K. Sharma, Hanhua Feng, Zhe Wang, Xiaowei Wang. Impact Of Deposition Parameters On The Characterizations Of Highly Orientated Aluminum Nitride For Film Bulk Acoustic Resonator Device |
| 551 | -- | 554 | Jian-Jun Yuan, Shi-Yuan Cheng, Lei Jiang, Lin-Xian Feng, Zhi-Qiang Fan. Nanostructured Aggregates From The Self-Assembly Of Bab Triblock Copolymers With A Hydrophilic Middle Block A In Water |
| 555 | -- | 558 | C. Venkatesh, Shashidhar Pati, Navakanta Bhat. Torsional Mems Varactor With Low Actuation Voltage |
| 559 | -- | 562 | Ching Lian Chua, Franck Chollet, Jie He. Study Of A Biological Actuator And Sensor: The Mimosa Pudica |
| 563 | -- | 568 | F. Calame, J. Baborowski, N. Ledermann, P. Muralt. Local Growth Of SOL-GEL Films By Means Of Microhotplates |
| 569 | -- | 572 | J.-M. Huang, A. Q. Liu, X. M. Zhang, J. Ahn. A Novel Lumped Two Degrees Of Freedom Pull-In Approach To Electrostatic Torsional Micromirrors |
| 573 | -- | 576 | J.-M. Huang, A. Q. Liu. Tunable Microelectromechanical Capacitor With Wide Tuning Ranges |
| 577 | -- | 580 | J. Li, Q. X. Zhang, A. Q. Liu. Prevent Notching For Soi Microstructure Fabrication Using SIO::2:: Thin Film Technique |
| 581 | -- | 584 | Liujiang Yu, B. K. Tay, D. Sheeja, Y. Q. Fu, Jianmin Miao. Fabrication Of Amorphous Carbon Micro-Membranes By Deep Reactive Ion Etching Technique |
| 585 | -- | 588 | Jong Ren Kong, Oliver Wilhelmi, Herbert O. Moser. Gap Optimisation For Proximity X-Ray Lithography Using The Super-Resolution Process |
| 589 | -- | 592 | Il-Woo Jung, Jaehong Park, Byoung-Doo Choi, Jongpal Kim, Sangjun Park, Seung Joon Paik, Dong-Il Cho. New Vertical Array Actuators Using Extended Sbm And Deep Pn Junction Isolation |
| 593 | -- | 596 | Guangya Zhou, Francis Eng Hock Tay, Chau Fook Siong. Modeling Of A Two-Axis Torsional Micromirror Using Ahdl |
| 597 | -- | 600 | Mechtilde Schäfer, Matthias Walz, Reiner Stein, Lars Vollmer, Günther Schuster, Andreas H. Foitzik. The Goeppingen Genereactor For Dna-Analysis |
| 601 | -- | 604 | Mechtilde Schäfer, R. Starzmann, Andreas H. Foitzik. Chemical Microreactors For In-Situ Online Process Monitoring |
| 605 | -- | 608 | Andreas H. Foitzik, Mechtilde Schäfer, Reiner Stein, Lars Vollmer, Günther Schuster. Three Dimensional Reference Structures For Confocal Microscopy |
| 609 | -- | 612 | Matthias Küchler, Thomas Otto, Thomas Gessner, Frank Ebling, Henning Schröder. Hot Embossing For Mems Using Silicon Tools |
| 613 | -- | 616 | Woei-Wan Tan, Pei Ge, Francis Eng Hock Tay, Ai-Poh Loh. Development Of A 3-Plates Capacitive Pressure Sensor |
| 617 | -- | 620 | Y. Murakoshi, X. C. Shan, Ryutaro Maeda. Application Of Micro Hot Embossing For MEMS Structures |
| 621 | -- | 625 | H. Liu, Stephen Y. M. Wan, G. C. Lim, Andrew A. O. Tay. The Development Of A Polymer Based Piezo-Actuated Micropump |
| 627 | -- | 630 | Rakesh P. Dhote, Sudhir S. Chiluveru, Saurabh A. Chandorkar, Prakash R. Apte. A Novel Heatuator |
| 631 | -- | 636 | Wei Zhang, Xi Yao, Xiaoqing Wu. Novel Preparation Scheme Of Monolithic Pyroelectric Thin Film Infrared Sensor |
| 637 | -- | 640 | Wei Zhang, Xi Yao, Xiaoqing Wu. Two-Dimensional Thermal Analysis Of Multi-Layer Thin Film Pyroelectric Infrared Detectors |
| 641 | -- | 644 | J. C. Chiou, Y. J. Lin. A New Modeling Method Of Vertical Electrostatic Comb Drive |
| 645 | -- | 649 | A. L. Palaniappan, J. Zhang, Xiaodi Su, Francis Eng Hock Tay. Electrical Impedance And Energy Dissipation Analyses Of Quartz Crystal Microbalance For Polymer Coating |
| 651 | -- | 654 | Yuanzhi Lao, Francis Eng Hock Tay, Guolin Xu, Diana Hartono, Y.-Y. Lee. A Non-Contact Micro Thermocycling Chip For Polymerase Chain Reactions |
| 655 | -- | 658 | S. S. Deng, Jun Wei, C. M. Tan, M. L. Nai, W. B. Yu, H. Xie. Low Temperature Silicon Wafer Bonding By Sol-Gel Processing |
| 659 | -- | 662 | Vijay K. Srivastava, Ratnamala Chatterjee, T. C. Goel. Structural And Magnetic Property Of Aged Ni::2::mnal Heusler Alloys |
| 663 | -- | 666 | Yee Ting Wong, M. Manimaran, Francis Eng Hock Tay. Synthesis And Characterisation Of Alkanethiolated Nanogold Clusters For Biomems Applications |
| 667 | -- | 670 | Thai-Quang Truong, Nam-Trung Nguyen. SU-8 On Pmma - A New Technology For Microfluidics |
| 671 | -- | 674 | D. Sheeja, B. K. Tay, L. J. Yu, Jianmin Miao, Y. Q. Fu, D. H. C. Chua, W. I. Milne. Fabrication Of Smooth Diamond-Like Carbon Microcantilever Arrays |
| 675 | -- | 678 | Shashidhar Pati, C. Venkatesh, Navakanta Bhat, Rudra Pratap. Voltage Controlled Oscillator Using Tunable Mems Resonator |
| 679 | -- | 682 | Min Hu, Hejun Du, Shih-Fu Ling, Bo Liu. A Rotary Micromirror For Fiber-Optic Switching |
| 683 | -- | 686 | Aiping Fang, Hian Kee Lee, Suresh Valiyaveeti. Microfluidic Channels Modified With Collodial Palladium As An Efficient Catalyst For High Throughput Suzuki Coupling Reactions |
| 687 | -- | 690 | Ciprian Iliescu, Tietun Sun, Jianmin Miao, Francis Eng Hock Tay. Fabrication Process Of A Capacitive Microphone With p++ Diaphragm And Silicon Bonded Top-Plate |
| 691 | -- | 694 | Min Hu, Hejun Du, Shih-Fu Ling, Bo Liu. Development Of An Soi-Based Micro Check Valve |
| 695 | -- | 698 | Jeng T. Sheu, Cheng C. Chen, Sun P. Yeh, Hseih T. Chou. Fabrication Of Ultrahigh-Density Nano-Pyramid Arrays (Npas) On (100) Silicon Wafer Using Scanning Probe Lithography And Anisotropic Wet Etching |
| 699 | -- | 702 | Jeng T. Sheu, Cheng C. Chen, Sun P. Yeh, Hseih T. Chou. Nanometer-Scale Patterning On Titanium Thin Film With Local Oxidation Of Scanning Probe Microscope |
| 703 | -- | 706 | Miroslav Husak, P. Kulha, Jiri Jakovenko, Z. Vyborny. Mechanical, Thermal And Electrical Behaviour Of Si Strain Gauge |
| 707 | -- | 710 | Masaaki Ichiki, Lulu Zhang, Zhen Yang, Tsuyoshi Ikehara, Ryutaro Maeda. Thin Film Formation On Non-Planar Surface With Use Of Spray Coating Fabrication |
| 711 | -- | 714 | S. Myllymaki, Eero Ristolainen, P. Heino, A. Lehto, K. Varjonen. Evaluation Of Resonating Channel Transistor In SOI Wafer |
| 715 | -- | 718 | Y. Chen, S. Janak, S. Uppili. A Fabrication Method To Form Glass Capillary |
| 719 | -- | 723 | V. A. Kudryashov, X.-C. Yuan, T. L. Tan, P. Lee, S. F. A. Karim, B. L. Tan. 3d Structures Formation In A Single Layer Su-8 Car Using Dual Uv And Electron-Beam Lithography |
| 724 | -- | 728 | X. C. Shan, Ryutaro Maeda, Tsuyoshi Ikehara, Z. F. Wang, C. K. Wong. A Polymer-Based Optical Switch Fabricated Using Silicon Process, Electroplating And Micro Hot Embossing |
| 729 | -- | 732 | Z. W. Zhong, K. S. Goh. New Development To Extend The Tool Life Of Ceramic Bonding Tools |
| 733 | -- | 736 | Z. W. Zhong, K. C. Chan, Y. H. Chen. Characterisation Of Electroplated Eutectic Sn-Ag Solder |